Reliability characterization of MEMS switch using MIM test structures
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of Electrical Systems and Information Technology
سال: 2014
ISSN: 2314-7172
DOI: 10.1016/j.jesit.2014.12.002